Litcius/Paper detail

AFM-Based nanofabrication and quality inspection of three-dimensional nanotemplates for soft lithography

Jia Deng, Lan Jiang, Bing Si, Huimin Zhou, Jingyan Dong, Pual Cohen

2021Journal of Manufacturing Processes35 citationsDOI

Topics & Concepts

NanolithographyMaterials scienceLithographySoft lithographyNanotechnologyNanomanufacturingDip-pen nanolithographyPDMS stampFabricationOptoelectronicsMedicineAlternative medicinePathologyNanofabrication and Lithography TechniquesForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing Techniques