AFM-Based nanofabrication and quality inspection of three-dimensional nanotemplates for soft lithography
Jia Deng, Lan Jiang, Bing Si, Huimin Zhou, Jingyan Dong, Pual Cohen
Topics & Concepts
NanolithographyMaterials scienceLithographySoft lithographyNanotechnologyNanomanufacturingDip-pen nanolithographyPDMS stampFabricationOptoelectronicsMedicineAlternative medicinePathologyNanofabrication and Lithography TechniquesForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing Techniques