Self-assembled silicon membrane resonator for high vacuum pressure sensing
Taeyeong Kim, Juhee Ko, Jungchul Lee
Topics & Concepts
ResonatorMaterials scienceResponsivityOptoelectronicsUltra-high vacuumVacuum chamberSiliconAmplitudeOptical cavityOpticsLaserComposite materialNanotechnologyPhysicsPhotodetectorMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesAdvanced Fiber Optic Sensors