Highly dispersed Gd-CeO2 nanocrystals supported on mesoporous silica composite particles towards photochemical (photo-assisted chemical) mechanical polishing
Yang Chen, Luning Zhong, Ailian Chen, Meng Fu, Xiaowang Lu
Topics & Concepts
Chemical-mechanical planarizationMaterials scienceAbrasivePolishingComposite numberNanoparticleMesoporous silicaChemical engineeringNanotechnologyMesoporous materialComposite materialCatalysisOrganic chemistryChemistryEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchElectronic and Structural Properties of Oxides