Microstructure, mechanical, and wettability properties of Al-doped diamond-like films deposited using a hybrid deposition technique: Bias voltage effects
Ji Cheng Ding, Mohan Chen, Haijuan Mei, Seonghee Jeong, Jun Zheng, Yang Yang, Qimin Wang, Kwang Ho Kim
Topics & Concepts
Materials scienceMicrostructureBiasingSputter depositionComposite materialWettingContact angleElastic modulusHigh-power impulse magnetron sputteringResidual stressDiamondSputteringThin filmVoltageNanotechnologyElectrical engineeringEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsLubricants and Their Additives