Study on ultrafast laser drilling with a flat-top beam in silicon wafer
Zhihui Huang, Quanying Li, Zhihui Lei, Leilei Gu, Chengkang Liang, Juan Su, Xiang Nan, Jianhong Liao
Topics & Concepts
WaferLaser drillingSiliconMaterials scienceOpticsUltrashort pulseLaserDrillingLaser beamsBeam (structure)OptoelectronicsPhysicsMetallurgyLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesPhotonic and Optical Devices