Litcius/Paper detail

The effect of Si content on microstructure and mechanical properties of Ti–Al–Ta–Si–N coatings

А. Р. Шугуров, E. D. Kuzminov, Yuriy A. Garanin, А. В. Панин, А. И. Дмитриев

2023Vacuum16 citationsDOI

Topics & Concepts

MicrostructureNanoindentationMaterials scienceCrystalliteTransmission electron microscopyAmorphous solidNanocompositeScanning electron microscopeCoatingX-ray photoelectron spectroscopyHigh-resolution transmission electron microscopyPhase (matter)Composite materialChemical engineeringCrystallographyNanotechnologyMetallurgyChemistryOrganic chemistryEngineeringMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis