Litcius/Paper detail

Effect of heat treatment on electrical and surface properties of tungsten oxide thin films grown by HFCVD technique

Guang-Lei Tan, Dan Tang, Davoud Dastan, Azadeh Jafari, José Silva, Xi-Tao Yin

2020Materials Science in Semiconductor Processing80 citationsDOI

Topics & Concepts

Materials scienceThin filmRaman spectroscopySubstrate (aquarium)Scanning electron microscopeSurface roughnessCrystallinityTungstenGrain boundaryOxideChemical vapor depositionGrain sizeAnalytical Chemistry (journal)Composite materialChemical engineeringNanotechnologyMetallurgyOpticsMicrostructureGeologyOceanographyChromatographyEngineeringPhysicsChemistryTransition Metal Oxide NanomaterialsZnO doping and propertiesGas Sensing Nanomaterials and Sensors