Toward cascadable MEMS logic device based on mode localization
Sherif Tella, Mohammad I. Younis
Topics & Concepts
Computer scienceElectronic engineeringResonatorMicroelectromechanical systemsLogic gateRealization (probability)Efficient energy useElectrical engineeringEngineeringMaterials scienceNanotechnologyMathematicsStatisticsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies