Single-crystalline SiC integrated onto Si-based substrates via plasma-activated direct bonding
Qiushi Kang, Chenxi Wang, Fanfan Niu, Shicheng Zhou, Jikai Xu, Yanhong Tian
Topics & Concepts
Materials sciencePlasma activationDirect bondingVoid (composites)Anodic bondingOptical transparencyPlasmaComposite materialHeterojunctionCorrosionSilicon carbideSiliconNanotechnologyChemical engineeringOptoelectronicsLayer (electronics)PhysicsEngineeringQuantum mechanicsSemiconductor materials and devices3D IC and TSV technologiesAdvanced ceramic materials synthesis