Infrared absorption and sub-bandgap photo-response of hyperdoped silicon by ion implantation and ultrafast laser melting
Chao Li, Ji-Hong Zhao, Zhanguo Chen
Topics & Concepts
Materials scienceOptoelectronicsPhotodetectorInfraredDopingIon implantationResponsivityBand gapSiliconPhotonicsOpticsIonChemistryOrganic chemistryPhysicsThin-Film Transistor TechnologiesSilicon Nanostructures and PhotoluminescenceLaser Material Processing Techniques