Manipulating the optoelectronic characteristic of AZO films by magnetron sputtering power
Yanfang Zhao, Wei Ding, Yuanbin Xiao, Ping Yang
Topics & Concepts
OptoelectronicsSputter depositionMaterials scienceCavity magnetronSputteringHigh-power impulse magnetron sputteringPower (physics)Thin filmNanotechnologyPhysicsQuantum mechanicsZnO doping and propertiesTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and Sensors