Elastic loading enhanced NH3 sensing for surface acoustic wave sensor with highly porous nitrogen doped diamond like carbon film
Hao Zhu, Dong Xie, Sixu Lin, Wenting Zhang, Youwei Yang, Ruijie Zhang, Xing Shi, Hongyan Wang, Zhengquan Zhang, Xiaotao Zu, Yongqing Fu, Yongliang Tang
Topics & Concepts
Materials scienceSurface acoustic waveDiamond-like carbonAdsorptionPorosityPlasma-enhanced chemical vapor depositionElectron cyclotron resonanceChemical vapor depositionDopingChemical polarityCarbon fibersAnalytical Chemistry (journal)DiamondMoleculeChemical engineeringThin filmComposite materialNanotechnologyOptoelectronicsComposite numberChemistryOpticsOrganic chemistryIonEngineeringPhysicsGas Sensing Nanomaterials and SensorsAcoustic Wave Resonator TechnologiesAnalytical Chemistry and Sensors