Etching mechanism of amorphous hydrogenated silicon nitride by hydrogen fluoride
Khabib Khumaini, Yewon Kim, Romel Hidayat, Tanzia Chowdhury, Hye-Lee Kim, Byungchul Cho, Sangjoon Park, Won‐Jun Lee
Topics & Concepts
Silicon nitrideMaterials scienceHydrogen fluorideNitrideEtching (microfabrication)HydrogenAmorphous solidFluorideMechanism (biology)SiliconChemical engineeringNanotechnologyInorganic chemistryOptoelectronicsChemistryCrystallographyOrganic chemistryEngineeringLayer (electronics)PhilosophyEpistemologyThin-Film Transistor TechnologiesSilicon Nanostructures and PhotoluminescenceSemiconductor materials and devices