Photonic crystal films with high reflectance based on mesoporous silica in the extreme ultraviolet range
Yuping Li, Ruonan Li, Huimin Bian, Huijun Hu, Kai Zhang, Peide Han
Topics & Concepts
Materials scienceExtreme ultraviolet lithographyExtreme ultravioletOpticsUltravioletOptoelectronicsPhotonic crystalRange (aeronautics)Synchrotron radiationMesoporous silicaMesoporous materialPhotonicsLaserChemistryPhysicsComposite materialBiochemistryCatalysisPhotonic Crystals and ApplicationsOptical Coatings and GratingsMesoporous Materials and Catalysis