Investigation of mechanism and surface morphology on the femtosecond laser ablation of silicon nitride under different auxiliary processing environments
Xitong Yu, Liping Jiang, Qiang Luan, Yukui Cai, Qinghua Song, Bing Wang, Zhanqiang Liu
Topics & Concepts
Materials scienceAblationLaser ablationSurface roughnessSilicon nitrideLaserFemtosecondSurface finishComposite materialSiliconOptoelectronicsOpticsEngineeringAerospace engineeringPhysicsLaser Material Processing TechniquesDiamond and Carbon-based Materials ResearchLaser-induced spectroscopy and plasma