The role of substrate temperature on the performance of humidity sensors manufactured from cerium oxide thin films
Hamed A. Gatea
Topics & Concepts
Materials scienceSubstrate (aquarium)Cerium oxideThin filmDiffractometerHumidityDeposition (geology)Pulsed laser depositionCeriumOxideCapacitanceChemical engineeringRelative humidityAnalytical Chemistry (journal)Scanning electron microscopeOptoelectronicsNanotechnologyComposite materialMetallurgyChemistryGeologyBiologyEngineeringElectrodeChromatographySedimentThermodynamicsPhysicsPaleontologyPhysical chemistryOceanographyGas Sensing Nanomaterials and SensorsZnO doping and propertiesAnalytical Chemistry and Sensors