Polishing-induced material attrition in surface-texturing AlN using a nanoscale polishing tool: An atomic-scale understanding
Phu-Cuong Le, Tan-Tai Do, Te‐Hua Fang, Chun‐I Lee
Topics & Concepts
PolishingMaterials scienceChemical-mechanical planarizationSurface finishvon Mises yield criterionSubstrate (aquarium)Surface roughnessDislocationNanoscopic scaleComposite materialStress (linguistics)NanotechnologyStructural engineeringFinite element methodOceanographyEngineeringGeologyPhilosophyLinguisticsAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research