Study of columnar growth, texture development and wettability of reactively sputter-deposited TiN, ZrN and HfN thin films at glancing angle incidence
Rubenson Mareus, Cédric Mastail, Fırat Anğay, Noël Brunetière, G. Abadias
Topics & Concepts
Materials scienceTexture (cosmology)Thin filmSputteringSputter depositionWettingTinComposite materialScanning electron microscopeMicrostructureCrystal (programming language)FacetingCrystallographyMetallurgyNanotechnologyImage (mathematics)Artificial intelligenceProgramming languageComputer scienceChemistryMetal and Thin Film MechanicsOptical Coatings and GratingsCopper Interconnects and Reliability