Evolution and influence of GaN/AlN heterointerface during the thinning process of GaN film
Yuqi Zhou, Yuhua Huang, Jinming Li, Fulong Zhu
Topics & Concepts
Materials scienceWurtzite crystal structureDislocationMetalorganic vapour phase epitaxyThinningHeterojunctionOptoelectronicsCondensed matter physicsComposite materialEpitaxyMetallurgyLayer (electronics)ZincEcologyPhysicsBiologyMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsSemiconductor materials and devices