Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches
Zongwei Xu, Lei Liu, Zhongdu He, Dongyu Tian, Alexander Hartmaier, Junjie Zhang, Xichun Luo, Mathias Rommel, K. Nordlund, Guoxiong Zhang, Fengzhou Fang
Topics & Concepts
Scanning electron microscopeMechanism (biology)Materials scienceStress (linguistics)IonElectron microscopeNanotechnologyBiomedical engineeringOptoelectronicsComposite materialCrystallographyChemistryOpticsEngineeringPhysicsOrganic chemistryLinguisticsPhilosophyQuantum mechanicsSilicon Carbide Semiconductor TechnologiesAluminum Alloys Composites PropertiesAdvanced Surface Polishing Techniques