Self-formation of dual glassy-crystalline structure in magnetron sputtered W–Zr films
P. Zeman, Stanislav Haviar, Michaela Červená
Topics & Concepts
Cavity magnetronMaterials scienceDual (grammatical number)Sputter depositionChemical engineeringCrystallographyThin filmNanotechnologyChemistrySputteringLiteratureArtEngineeringMetallic Glasses and Amorphous AlloysCopper Interconnects and ReliabilityElectrodeposition and Electroless Coatings