Optimized gallium Oxide/MEMS gas sensor for H2S gas detection that exhibits increased sensitivity and stability
Ming‐Fong Tsai, Ruei-Yan Ding, Ting‐Jen Hsueh
Topics & Concepts
Microelectromechanical systemsSensitivity (control systems)GalliumMaterials scienceGallium oxideOptoelectronicsNanotechnologyOxideGas analysisGas detectorAnalytical Chemistry (journal)ChemistryChromatographyElectronic engineeringElectrical engineeringEngineeringMetallurgyDetectorGas Sensing Nanomaterials and SensorsTransition Metal Oxide NanomaterialsZnO doping and properties