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Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

Debdyuti Mandal, Sourav Banerjee

2022Sensors424 citationsDOIOpen Access PDF

Abstract

Surface acoustic waves (SAWs) are the guided waves that propagate along the top surface of a material with wave vectors orthogonal to the normal direction to the surface. Based on these waves, SAW sensors are conceptualized by employing piezoelectric crystals where the guided elastodynamic waves are generated through an electromechanical coupling. Electromechanical coupling in both active and passive modes is achieved by integrating interdigitated electrode transducers (IDT) with the piezoelectric crystals. Innovative meta-designs of the periodic IDTs define the functionality and application of SAW sensors. This review article presents the physics of guided surface acoustic waves and the piezoelectric materials used for designing SAW sensors. Then, how the piezoelectric materials and cuts could alter the functionality of the sensors is explained. The article summarizes a few key configurations of the electrodes and respective guidelines for generating different guided wave patterns such that new applications can be foreseen. Finally, the article explores the applications of SAW sensors and their progress in the fields of biomedical, microfluidics, chemical, and mechano-biological applications along with their crucial roles and potential plans for improvements in the long-term future in the field of science and technology.

Topics & Concepts

PiezoelectricityAcousticsSurface acoustic waveTransducerSurface acoustic wave sensorAcoustic waveCoupling (piping)Surface wavePiezoelectric sensorMaterials scienceLamb wavesField (mathematics)PhysicsElectrical engineeringEngineeringMechanical engineeringOpticsPure mathematicsMathematicsAcoustic Wave Resonator TechnologiesMicrofluidic and Bio-sensing TechnologiesAdvanced MEMS and NEMS Technologies