Fluorinated porous organic polymers for efficient recovery perfluorinated electronic specialty gas from exhaust gas of plasma etching
Wenxiang Zhang, Yinhui Li, Yue Wu, Yu Fu, Shu‐Hui Chen, Zhonghui Zhang, Songjie He, Tong Yan, Heping Ma
Topics & Concepts
PolymerAdsorptionEtching (microfabrication)Chemical engineeringFluorinePlasma etchingExhaust gasPorosityPorous mediumChemistryMaterials scienceNanotechnologyOrganic chemistryLayer (electronics)EngineeringCovalent Organic Framework ApplicationsMembrane Separation and Gas TransportMetal-Organic Frameworks: Synthesis and Applications