Tribological Property of ta-CNx:Ta Deposited via Ion Beam Assisted-Filtered Arc Deposition
Takayuki TOKOROYAMA, Yuya TAGAMI, Motoyuki Murashima, W.-Y. Lee, Noritsugu Umehara, Hiroyuki Kousaka
Topics & Concepts
Materials scienceX-ray photoelectron spectroscopyTantalum nitrideTantalumAmorphous solidCoatingAmorphous carbonIon beam-assisted depositionDeposition (geology)Raman spectroscopyTribologyNitrideAnalytical Chemistry (journal)Carbon nitrideComposite materialMetallurgyIonIon beamChemical engineeringLayer (electronics)ChemistryBiochemistryChromatographyBiologyPaleontologyEngineeringOrganic chemistrySedimentOpticsCatalysisPhotocatalysisPhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites