Wafer map failure pattern recognition based on deep convolutional neural network
Shouhong Chen, Yuxuan Zhang, Xingna Hou, Yuling Shang, Ping Yang
Topics & Concepts
Softmax functionComputer sciencePattern recognition (psychology)Artificial intelligenceConvolutional neural networkNormalization (sociology)WaferLayer (electronics)Feature extractionData miningMaterials scienceSociologyComposite materialAnthropologyNanotechnologyIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques