Microdynamic behaviors of Au/Ni-assisted chemical etching in fabricating silicon nanostructures
Wenxuan Wu, Yun Chen, Bin Xie, Hengxu Wu, Liang Cheng, Yuanhui Guo, Chuhao Cai, Maoxiang Hou, Xin Chen
Topics & Concepts
Materials scienceEtching (microfabrication)SiliconNanostructureIsotropic etchingNanotechnologyOptoelectronicsLayer (electronics)Nanowire Synthesis and ApplicationsAdvancements in Semiconductor Devices and Circuit DesignSilicon Nanostructures and Photoluminescence