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Applications of atomic force microscopy in materials, semiconductors, polymers, and medicine: A minireview

Jubo Chen, Ke Xu

2020Instrumentation Science & Technology24 citationsDOI

Abstract

Atomic force microscope (AFM), as a type scanning probe microscope (SPM), offers advantages that include high resolution, real-time analysis, in-situ imaging, few environmental restrictions, and simple operation. So far, AFM has been applied to a wide variety of scientific fields. This paper reviews several advanced research results using AFM in the micro-nano science community to operate in the four main areas of materials, semiconductor industry, polymers, and medicine, and summarizes their methods and related technologies. While reviewing their findings, this paper also illustrates the advantages of using AFM-based methods compared to previous procedures. Finally, the conclusion projects the future development, challenges and opportunities of AFM. This paper provides guidance on the use of AFM for nano-manipulation and promotes the development of AFM in new fields.

Topics & Concepts

Atomic force microscopyNanotechnologyMaterials scienceSemiconductor industrySemiconductorScanning probe microscopyEngineeringOptoelectronicsManufacturing engineeringForce Microscopy Techniques and ApplicationsNear-Field Optical MicroscopyIntegrated Circuits and Semiconductor Failure Analysis
Applications of atomic force microscopy in materials, semiconductors, polymers, and medicine: A minireview | Litcius