MOVPE growth of AlN and AlGaN films on N-polar annealed and sputtered AlN templates
Gaku Namikawa, Kanako Shojiki, Riku Yoshida, Ryusei Kusuda, Kenjiro Uesugi, Hideto Miyake
Topics & Concepts
Metalorganic vapour phase epitaxyHillockSapphireMaterials scienceCrystallinityEpitaxySubstrate (aquarium)OptoelectronicsNanotechnologyOpticsComposite materialLayer (electronics)LaserGeologyOceanographyPhysicsGaN-based semiconductor devices and materialsGa2O3 and related materialsZnO doping and properties