Insights into the effects of Al-ion implantation temperature on material properties of 4H-SiC
Fanzhengshu Wu, Jie Zhang, Wei Xi, Yanqing Chi, Qibin Liu, Lei Yang, Hong-Ping Ma, Qing‐Chun Zhang
Topics & Concepts
Ion implantationX-ray photoelectron spectroscopyMaterials scienceDensity functional theoryMicrostructureRaman spectroscopyTransmission electron microscopyAnnealing (glass)DopingValence (chemistry)Analytical Chemistry (journal)IonChemistryNanotechnologyOptoelectronicsComputational chemistryNuclear magnetic resonanceMetallurgyOpticsOrganic chemistryPhysicsChromatographySilicon Carbide Semiconductor TechnologiesAdvanced ceramic materials synthesisSemiconductor materials and interfaces