Centimeter-scale low-damage micromachining on single-crystal 4H–SiC substrates using a femtosecond laser with square-shaped Flat-Top focus spots
Jiangyou Long, Qingfa Peng, Gaopan Chen, Yuliang Zhang, Xiaozhu Xie, Guoshun Pan, Xiaofeng Wang
Topics & Concepts
Materials scienceSurface micromachiningLaserSurface roughnessFemtosecondOpticsPolishingSurface finishCeramicLayer (electronics)OptoelectronicsComposite materialFabricationMedicineAlternative medicinePathologyPhysicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesNonlinear Optical Materials Studies