Spin coating in semiconductor lithography: Advances in modeling and future prospects
Pan Liu, Liejie Huang, Chaoyi Zheng, Yanan Bao, Dawei Gao, Guodong Zhou
Topics & Concepts
LithographySemiconductorNanotechnologySpin coatingMaterials scienceSpin (aerodynamics)CoatingEngineering physicsOptoelectronicsPhysicsThermodynamicsFluid Dynamics and Thin FilmsBlock Copolymer Self-AssemblyNanofabrication and Lithography Techniques