Fabrication of 4H-SiC piezoresistive pressure sensor for high temperature using an integrated femtosecond laser-assisted plasma etching method
Chen Wu, Xudong Fang, Ziyan Fang, Hao Sun, Sheng Li, Libo Zhao, Bian Tian, Ming Zhong, Ryutaro Maeda, Zhuangde Jiang
Topics & Concepts
Materials scienceLaserFemtosecondIsotropic etchingOptoelectronicsEtching (microfabrication)Piezoresistive effectFabricationMicroelectromechanical systemsComposite materialOpticsPathologyMedicinePhysicsAlternative medicineLayer (electronics)Diamond and Carbon-based Materials ResearchLaser Material Processing TechniquesNanowire Synthesis and Applications