Effect of substrate bias on structure and properties of (AlTiCrZrNb)N high-entropy alloy nitride coatings through arc ion plating
Chi Cheng, Haiqing Li, Cheng Zhang, Chao-Qian Guo, Jianwei Li, Haoqiang Zhang, Songsheng Lin, Qimin Wang
Topics & Concepts
Materials scienceIon platingBiasingTribologyMicrostructureNitrideCoatingComposite materialSubstrate (aquarium)WaferMetallurgyVoltageNanotechnologyLayer (electronics)Quantum mechanicsGeologyPhysicsOceanographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh Entropy Alloys Studies