A novel flexible sensor for double-parameter decoupling measurement of temperature and pressure with high sensitivity and wide range
Leijin Fan, Xiaofeng Yang, Hu Sun
Abstract
A flexible two-parameter sensor based on the thermal-resistance effect and piezocapacitive effect is proposed to achieve the completely decoupled measurement of temperature and pressure.
Topics & Concepts
Decoupling (probability)Materials scienceSensitivity (control systems)Range (aeronautics)Atmospheric temperature rangeThermodynamicsElectronic engineeringComposite materialPhysicsControl engineeringEngineeringAdvanced Sensor and Energy Harvesting MaterialsGas Sensing Nanomaterials and SensorsAdvanced MEMS and NEMS Technologies