Effect of oxygen flow rate on magnetron-sputtering-based preparation and photoelectric properties of vanadium dioxide films
Chuandong Zhang, Yuanjun Guo, Zhenhuai Yang, Lei Liu, Kesheng Guo, Jie Bai, Hong Liu, Yongneng Xiao, Lang Hu, Qiang Hu, Qiang Wang
Topics & Concepts
Vanadium dioxidePhotoelectric effectVanadiumSputter depositionOxygenSputteringMaterials scienceVolumetric flow rateCavity magnetronInorganic chemistryChemistryAnalytical Chemistry (journal)Chemical engineeringThin filmNanotechnologyOptoelectronicsEnvironmental chemistryThermodynamicsOrganic chemistryPhysicsEngineeringTransition Metal Oxide NanomaterialsGas Sensing Nanomaterials and SensorsGa2O3 and related materials