Investigation of persulfate oxidizers in Co CMP slurry through Co surface adsorption and oxidation behaviors
Eun Su Jung, Jin Hyun Choe, Chae Yeon Lee, JinUk Yoo, Tae-Min Choi, Hwa Rim Lee, Dong-Hyun Kim, Sung Gyu Pyo
Topics & Concepts
AdsorptionPersulfateSlurryChemical engineeringMaterials scienceSurface modificationInorganic chemistryChemistryOrganic chemistryCatalysisComposite materialEngineeringAdvanced Surface Polishing TechniquesMetal Extraction and BioleachingMinerals Flotation and Separation Techniques