Borate nonlinear optical single crystal surface finishing by argon cluster ion sputtering
N. G. Korobeishchikov, I. V. Nikolaev, Victor V. Atuchin∥⊥, Igor P. Prosvirin, A. Tolstogouzov, Vasiliy Pelenovich, Dejun Fu
Topics & Concepts
SputteringMaterials scienceArgonX-ray photoelectron spectroscopyIonMonatomic gasIon beamAtomic physicsCluster (spacecraft)Single crystalBoronAnalytical Chemistry (journal)Thin filmNanotechnologyCrystallographyChemistryChemical engineeringProgramming languageChromatographyOrganic chemistryComputer sciencePhysicsEngineeringIon-surface interactions and analysisDiamond and Carbon-based Materials ResearchElectronic and Structural Properties of Oxides