Dewetting of Ni silicide thin film on Si substrate: In-situ experimental study and phase-field modeling
Jianbao Gao, Annie Malchère, Shenglan Yang, Andréa Campos, Ting Luo, Khalid Quertite, Philippe Steyer, Christophe Girardeaux, Lijun Zhang, D. Mangelinck
Topics & Concepts
Materials scienceDewettingSilicideIn situSubstrate (aquarium)Thin filmPhase (matter)MetallurgyNanotechnologySiliconGeologyMeteorologyOceanographyPhysicsOrganic chemistryChemistrySemiconductor materials and interfacesSolidification and crystal growth phenomenaAnodic Oxide Films and Nanostructures