Litcius/Paper detail

Synthesis of Mo/Mo2C-DLC composite thin films via diffusion of plasma generated C atoms into sputter coated Mo thin films

Oğuldeha Kesik, Arya Elçi, Mehmet Burak Kaynar, A. Ceylan

2025Vacuum10 citationsDOI

Topics & Concepts

Materials scienceThin filmSputteringDiffusionPlasmaComposite numberChemical engineeringSputter depositionComposite materialNanotechnologyEngineeringPhysicsThermodynamicsQuantum mechanicsAdvanced materials and compositesMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research