Microstructure, chemical composition and mechanical properties of rhenium nitride hard coating deposited by reactive magnetron sputtering
M. Arroyave, C. Ruiz, P. Echeverri, C. Jaoul, M. Alejandro Grisales, Gilberto Bejarano
Topics & Concepts
Materials scienceRheniumX-ray photoelectron spectroscopySputter depositionCoatingNitrideMicrostructureZirconium nitridePhysical vapor depositionTinSubstrate (aquarium)SputteringChemical vapor depositionThin filmLayer (electronics)Analytical Chemistry (journal)Chemical engineeringTitanium nitrideMetallurgyComposite materialNanotechnologyChemistryOrganic chemistryEngineeringGeologyOceanographyMetal and Thin Film MechanicsBoron and Carbon Nanomaterials ResearchGaN-based semiconductor devices and materials