Machine learning-based techniques for fault diagnosis in the semiconductor manufacturing process: a comparative study
Abubakar Abdussalam Nuhu, Qasim Zeeshan, Babak Safaei, Muhammad Atif Shahzad
Topics & Concepts
Computer scienceMachine learningArtificial intelligenceSemiconductor device fabricationBig dataProcess (computing)Missing dataImputation (statistics)Predictive analyticsData miningAnalyticsWaferEngineeringOperating systemElectrical engineeringIndustrial Vision Systems and Defect DetectionImbalanced Data Classification TechniquesAdvanced Statistical Process Monitoring