Atomic layer deposited SnO2/ZnO composite thin film sensors with enhanced hydrogen sensing performance
Xin-Yue Zhang, Qiang Ren, Chen Wang, Lin Zhu, Wen-Juan Ding, Yanqiang Cao, Wei-Ming Li, Di Wu, Aidong Li, Aidong Li
Topics & Concepts
Atomic layer depositionMaterials scienceThin filmComposite numberHydrogenHeterojunctionOptoelectronicsDeposition (geology)Hydrogen sensorChemical engineeringNanotechnologyLayer (electronics)Composite materialCatalysisPalladiumChemistryPaleontologyBiochemistryBiologyOrganic chemistrySedimentEngineeringGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsZnO doping and properties