Impact of precursor exposure on process efficiency and film properties in spatial atomic layer deposition
Việt Hương Nguyễn, Abderrahime Sekkat, Carmen Jiménez, D. Muñoz, Daniel Bellet, David Muñoz‐Rojas
Topics & Concepts
Atomic layer depositionSubstrate (aquarium)Deposition (geology)Materials scienceMultiphysicsNanotechnologyThin filmChemical engineeringThermodynamicsPhysicsBiologyPaleontologyOceanographyGeologyEngineeringSedimentFinite element methodSemiconductor materials and devicesElectronic and Structural Properties of OxidesZnO doping and properties