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Recent advances and challenges in the MOCVD growth of indium gallium nitride: A brief review

Aik Kwan Tan, Nur Atiqah Hamzah, Mohd Anas Ahmad, S.S. Ng, Z. Hassan

2022Materials Science in Semiconductor Processing52 citationsDOI

Topics & Concepts

Materials scienceMetalorganic vapour phase epitaxyIndiumChemical vapor depositionIndium gallium nitrideGallium nitrideNitrideOptoelectronicsGalliumNanotechnologyEngineering physicsEpitaxyMetallurgyEngineeringLayer (electronics)GaN-based semiconductor devices and materialsMetal and Thin Film MechanicsGa2O3 and related materials
Recent advances and challenges in the MOCVD growth of indium gallium nitride: A brief review | Litcius