Top-down fabrication of Ge nanowire arrays by nanoimprint lithography and hole gas accumulation in Ge/Si core–shell nanowires
Yong-Lie Sun, Wipakorn Jevasuwan, Naoki Fukata
Topics & Concepts
NanowireMaterials scienceNanoimprint lithographyEtching (microfabrication)GermaniumNanotechnologyFabricationOptoelectronicsSiliconField-effect transistorTransmission electron microscopyTransistorLayer (electronics)VoltagePathologyMedicineAlternative medicineQuantum mechanicsPhysicsNanowire Synthesis and ApplicationsSemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit Design