Direct bonding of silicon nitride to copper via laser surface modification
Yanyu Song, Haitao Zhu, Duo Liu, Xiaoguo Song, Caiwang Tan, Jian Cao
Topics & Concepts
CopperMaterials scienceSilicon nitrideCeramicSurface modificationEutectic systemSiliconNitrideLaserDirect bondingSubstrate (aquarium)TinMetallurgyLayer (electronics)Composite materialChemical engineeringAlloyOpticsOceanographyGeologyPhysicsEngineeringAdvanced ceramic materials synthesis3D IC and TSV technologiesAdvanced materials and composites