Experimental Demonstration of TreeFETs Combining Stacked Nanosheets and Low Doping Interbridges by Epitaxy and Wet Etching

Abstract

A novel TreeFET architecture as a combination of stacked nanosheets and additional fin interbridges between nanosheets can enhance I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</sub> per footprint. The straight sidewalls of interbridges requires {110} sidewalls, which can be fabricated using n <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> Ge/Ge <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.95</sub> Si <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.05</sub> /Ge epitaxial layers with co-optimization of wet etching. The TreeFET with {110} interbridges has I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</sub> per footprint of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$870~\mu \text{A}/\mu \text{m}$ </tex-math></inline-formula> at V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">OV</sub> =V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">DS</sub> =0.5V (2.1X of the referenced 3 stacked nanosheets). To minimize the impurity scattering in the interbridges, the 400 °C annealing is used to drive phosphorus in interbridges into the nanosheets, while the low source/drain resistance is still maintained. The increasing I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</sub> down to 77 K indicates that the phonon scattering dominates, and the impurity scattering is minimized in the interbridge channels.

Topics & Concepts