HiPIMS pulse shape influence on the deposition of diamond-like carbon films
R. Serra, Fábio Ferreira, A. Cavaleiro, J.C. Oliveira
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceDiamondCarbon fibersDeposition (geology)Diamond-like carbonSynthetic diamondCarbon filmOptoelectronicsSputter depositionNanotechnologyMetallurgyThin filmSputteringComposite materialComposite numberBiologyPaleontologySedimentMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications