Control of the temperature field by double induction coils for growth of large-sized SiC single crystals <i>via</i> the physical vapor transport technique
Naiji Yang, Bo Song, Wenjun Wang, Hui Li
Abstract
The double induction coils have beneficial effect on the growth of large-sized SiC via PVT, and are helpful to lessening thermal stress, enhancing growth rate, improving temperature field via the coil movement.
Topics & Concepts
Materials scienceInduction coilField (mathematics)Electromagnetic coilOptoelectronicsElectrical engineeringEngineeringMathematicsPure mathematicsSilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesSilicon and Solar Cell Technologies